Method of forming electronic devices utilizing diamond

Details Method of forming electronic devices utilizing diamond Method of forming electronic devices utilizing diamond

1991-10-15

1993-10-12

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437918, 437942, 148 334, H01L 21265

Patent

active

052524981

ABSTRACT:
A diamond thermistor is described. Surface portions of temperature sensing diamond of the thermistor are doped with impurity ions by ion implantation except for a sensing area thereof. A pair of electrodes are formed on the impurity regions in order to make good ohmic contacts with the diamond. The damage caused by the ion implantation is remedied by subjecting the diamond film to laser annealing.

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patent: 4863529 (1989-09-01), Imai et al.
patent: 5051785 (1991-09-01), Beetz, Jr. et al.
patent: 5089802 (1992-02-01), Yamazaki

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