Method of manufacturing a gas sensing device

Details Method of manufacturing a gas sensing device Method of manufacturing a gas sensing device

1981-06-19

1982-12-07

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156610, 156614, 427 87, 427101, 427102, 427103, 427 99, 427124, 427125, 4271263, G01N 2712

Patent

active

043627650

ABSTRACT:
A gas sensing device comprises a gas sensing element comprising a gas-sensitive resistive film formed of an aggregate of ultrafine particles of a suitable material deposited on the surface of a substrate of an electrical insulator formed with electrodes. In a method of manufacturing such a gas sensing device, a gas-sensitive material is evaporated in a gas atmosphere to provide the gas-sensitive resistive film of ultrafine particles of the material.

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