Method of manufacturing a thin-film magnetic head

Details Method of manufacturing a thin-film magnetic head Method of manufacturing a thin-film magnetic head

1987-01-08

1988-12-20

Echols, P. W.

Metal working

Method of mechanical manufacture

Electrical device making

156643, 156646, 156652, 156656, 1566591, 156667, G11B 5127

Patent

active

047917199

ABSTRACT:
A first magnetic layer is formed upon a non-magnetic substrate, a gap layer is formed upon the first magnetic layer, a conductor coil covered with an insulation layer is formed upon the gap layer, a second magnetic layer is formed upon the gap layer and the insulation layer, a magnetic gap being formed between the first and second magnetic layers at a front portion facing a recording medium, and the second magnetic layer being connected to the first magnetic layer at a back portion. After forming a mask made of metal oxide upon the second magnetic layer, the second magnetic layer, the gap layer, and the first magnetic layer are formed into a predetermined shape respectively at the tip portion by dry etching. Thus, a high performance thin-film magnetic head having the same widths for the first and second magnetic layers is obtained.

REFERENCES:
patent: 4317149 (1982-02-01), Elser et al.
patent: 4390394 (1983-06-01), Mathuni et al.
patent: 4422117 (1983-12-01), Nomura et al.
patent: 4436593 (1984-03-01), Osborne et al.
patent: 4592801 (1986-06-01), Hara et al.

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