Method of and apparatus for outgassing raw material used to grow

Details Method of and apparatus for outgassing raw material used to grow Method of and apparatus for outgassing raw material used to grow

1980-10-20

1981-12-15

Clements, Gregory N.

Chemistry: physical processes

Physical processes

23295R, 23305A, 422290, 423600, 423625, C22B 905, C30B 2920

Patent

active

043057250

ABSTRACT:
A method and apparatus for outgassing raw materials includes the steps of and means for heating the material to a temperature of about 800.degree. C. and maintaining that temperature for a first bake out period during which the material is maintained at a pressure of about 200 millitorr and for a second bake out period during which the material is maintained at a pressure of about 5 millitorr or less. During the first bake out period, an inert gas is backstreamed through the raw material.

REFERENCES:
patent: 3011870 (1961-12-01), Webb et al.
patent: 3608050 (1971-09-01), Carman et al.
patent: 3922872 (1975-12-01), Reilly et al.
patent: 3960503 (1976-06-01), Rice
patent: 3998686 (1976-12-01), Meiling et al.

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