Probe apparatus and a method for polishing a probe

Details Probe apparatus and a method for polishing a probe Probe apparatus and a method for polishing a probe

1998-01-21

2000-02-15

Rose, Robert A.

Abrading

Abrading process

451 67, 451162, B24B 104

Patent

active

060246294

ABSTRACT:
A probe apparatus according to the present invention comprises a stage carrying an object of inspection thereon and rotatable and movable in the horizontal and vertical directions, a probe located over the stage and adapted to be brought into contact with the object of inspection on the stage in order to subject the object to electrical inspection, a polisher carrying section attached to the stage and capable of carrying thereon a polisher for polishing the probe, a storage mechanism for storing the polisher, and a transportation mechanism for transporting the polisher between the storage mechanism and the polisher carrying section.

REFERENCES:
patent: 4590422 (1986-05-01), Milligan
patent: 5642432 (1997-06-01), Mori
Patent Abstracts of Japan, vol. 014, No. 136 (P-1021), Mar. 14, 1990, JP 02 002939, Jan. 8, 1990.
Patent Abstracts of Japan, vol. 010, No. 352 (E-458), Nov. 27, 1986, JP 61 152034, Jul. 10, 1986.

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