Method of determining real time removal rate for polishing

Details Method of determining real time removal rate for polishing Method of determining real time removal rate for polishing

1999-01-22

2000-02-15

Banks, Derris Holt

Abrading

Precision device or process - or with condition responsive...

Computer controlled

451 6, 451 28, 451 41, B24B 4900, B24B 5100

Patent

active

060246286

ABSTRACT:
A method of determining a real time removal rate. A material layer is polished. During the polishing process, a light is incident onto the material layer continuously. The incident light is reflected from the material layer with a reflected light intensity. By integrating the reflected light intensity, followed by dividing the integration with a product of a differential of the reflected light intensity and the polishing time, an I-Dt transformation is obtained. The I-Dt transformation has a period which reflects the removal rate through calculation of optical principle.

REFERENCES:
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5643050 (1997-07-01), Chen
patent: 5663797 (1997-09-01), Sandhu
patent: 5791969 (1998-08-01), Lund
patent: 5872633 (1999-02-01), Holzapfel et al.

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