Process for producing or inspecting micropatterns on large-area

Details Process for producing or inspecting micropatterns on large-area Process for producing or inspecting micropatterns on large-area

1990-03-28

1992-04-07

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 1, 355 54, G03B 2742

Patent

active

051032570

ABSTRACT:
A process for producing micropatterns on large-area substrates, especially liquid crystal displays, in which patterns are transferred from at least one mask onto a substrate by optical means which contain lens or mirror systems. Patterns are sensed continuously from the mask in small areas and transferred by an optical system to the substrate. The transfer system, the mask, and the substrate are positionable relative to one another. The process enables large-area displays having side lengths of at least 10 centimeters to be manufactured reliably and in large quantities. Apparatus for carrying out the process is also disclosed.

REFERENCES:
patent: 4118230 (1978-10-01), Binder
patent: 4202631 (1980-05-01), Uchiyama et al.
patent: 4247203 (1981-01-01), Levy et al.
patent: 4538914 (1985-09-01), Yomoda et al.
patent: 4769680 (1988-09-01), Resor et al.
patent: 4924257 (1988-10-01), Jain
patent: 4958160 (1990-09-01), Ito et al.
patent: 4980718 (1990-12-01), Salter et al.
Patents Abstracts of Japan, P-481, Jul. 26, 1986, vol. 10, No. 21.
JENA Brochure, p. 9.

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