Fishing – trapping – and vermin destroying
Patent
1990-11-26
1992-04-07
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 52, 437 65, H01L 2176
Patent
active
051028174
ABSTRACT:
DRAM cells and arrays of cell on a semiconductor substrate, together with methods of fabrication, are disclosed wherein the cells are formed in pairs or quartets by excavating a trench or two trenches through the cell elements to split an original cell into two or four cells during the fabrication. The cells include vertical field effect transistors and capacitors along the trech sidewalls with word lines and bit lines crossing over the cells.
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Chatterjee Pallab K.
Shah Ashwin H.
Chaudhuri Olik
Comfort James T.
Fourson G.
Kesterson James C.
Sharp Melvin
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