Planar oxygen sensor

Details Planar oxygen sensor Planar oxygen sensor

1990-12-10

1992-04-07

Niebling, John

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204412, 204426, 204414, G01N 2627

Patent

active

051025256

ABSTRACT:
A planar oxygen sensor has an insulating substrate, a cathode formed on the insulating substrate generally at the center thereof; another electrode formed on the insulating substrate in a region other than the region of the cathode, a gas permeable membrane stretched to cover these electrodes and having its peripheral portion supported on the insulating substrate, and an electrolytic solution charged between the gas permeable membrane and the insulating substrate. A surface of the cathode is substantially in contact with the gas permeable membrane and is formed at a position higher than the gas permeable membrane support portion of the insulating substrate. A portion of the insulating substrate surface other than the region where the cathode is formed is recessed. Because the layer of electrolytic solution on the cathode is thin, oxygen molecules passing through the gas permeable membrane can immediately serve for the reduction at the cathode, thereby increasing the response speed of the planar oxygen sensor. Also, the amount of electrolytic solution is increased by the recess to extend the life of the sensor.

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