X-ray exposure system

Details X-ray exposure system X-ray exposure system

1997-10-09

1998-07-14

Porta, David P.

X-ray or gamma ray systems or devices

Source

378140, 378208, H05G 200

Patent

active

057816085

ABSTRACT:
An x-ray exposure system that reduces the time required to evacuate an internal chamber of a vacuum vessel, uses a low-power laser to produce the plasma that generates the x-rays, and enables the sample to be maintained outside the vacuum vessel. The system includes a detachable cover member that hermetically seals the opening of the vacuum vessel. The cover member includes a through-hole that forms an x-ray irradiation window and is sealed by an x-ray transmission member. In the through-hole, an x-ray generation target is provided that is irradiated by an external laser beam, via a laser beam entry window.

REFERENCES:
patent: 4484339 (1984-11-01), Mallozzi et al.
patent: 4538291 (1985-08-01), Iwamatsu
patent: 4700371 (1987-10-01), Forsyth et al.
patent: 4723262 (1988-02-01), Noda et al.
patent: 4866517 (1989-09-01), Mochizuki et al.
patent: 5151928 (1992-09-01), Hirose
patent: 5317618 (1994-05-01), Nakahara et al.

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