Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-05-10
1990-07-03
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 39, 528401, 528402, B05D 306, C08G 7324, C08G 6522
Patent
active
049389955
ABSTRACT:
The subject invention relates to a process for the deposition of an oxygen-containing high fluoropolymer thin film onto an approxpriate substrate comprising loading the substrate in an enclosed reactor; evacuating the reactor; charging the reactor with an inert carrier gas and an oxygen-containing fluorocarbon monomer feed gas; and plasma-polymerizing the feed gas such that a thin film of polymerized monomer is deposited onto the substrate.
The invention further relates to an insulation material comprising the fluoropolymer thin film recited above, a plasma polymerized thin film of an oxygen-containing fluoropolymer, and the use of a polymerization precursor monomer for such thin films that is an oxygen-containing fluorocarbon monomer.
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Giordano Paul J.
Prohaska George W.
Smierciak Richard C.
Curatolo Joseph G.
Evans Larry W.
Morgenstern Norman
Padgett Marianne
Phillips Sue E.
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