Specialized metallurgical processes – compositions for use therei – Compositions – Consolidated metal powder compositions
Patent
1995-10-30
1998-07-14
Jordan, Charles T.
Specialized metallurgical processes, compositions for use therei
Compositions
Consolidated metal powder compositions
75232, 75340, C22C 104, C22C 2100
Patent
active
057807558
ABSTRACT:
A sputtering target comprising a body of metal such as aluminum and its alloy with an ultrafine grain size and small second phase. Also described is a method for making an ultra-fine grain sputtering target comprising melting, atomizing, and depositing atomized metal to form a workpiece, and fabricating the workpiece to form a sputtering target. A method is also disclosed that includes the steps of extruding a workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, and fabricating the extruded article into a sputtering target. The extrusion may be performed several times, producing grain size of still smaller size and controlled grain texture.
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Dunlop John Alden
Emigh Roger Alan
Kardokus Janine Kiyabu
Yuan Jun
Jenkins Daniel
Johnson Matthey Electronics Inc.
Jordan Charles T.
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