Solid-state imaging device

Details Solid-state imaging device Solid-state imaging device

1979-08-13

1982-11-23

Edlow, Martin H.

357 2, 357 4, 357 24, 357 30, H01L 2714

Patent

active

043608213

ABSTRACT:
In a solid-state imaging device having a plurality of photosensitive portions and a semiconductor substrate which includes at least scanning means for scanning the photosensitive portions, the photosensitive portions including a layer of a photosensitive material overlying the semiconductor substrate and a transparent electrically conductive film overlying the photosensitive material layer; a solid-state imaging device characterized in that the photosensitive material is an amorphous material whose indispensable constituent is silicon and which contains hydrogen. The hydrogen content of the photosensitive material is preferably 5 atomic-% to 30 atomic-%, especially 10 atomic-% to 25 atomic-%.

REFERENCES:
patent: 3699375 (1972-10-01), Weibel
patent: 4064521 (1977-12-01), Carlson
patent: 4069492 (1978-01-01), Pankove
patent: 4117506 (1978-09-01), Carlson
patent: 4143389 (1979-03-01), Koike
patent: 4147667 (1979-04-01), Chevallier
patent: 4155006 (1979-05-01), Sato
patent: 4190851 (1980-02-01), Finnila
patent: 4202928 (1980-05-01), Staebler
patent: 4209806 (1980-06-01), Koike
Imamura, et al., App. Phys. Lett. 35 (4), Aug. 15, 1979.

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