Surface acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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333153, H01L 4108

Patent

active

047483644

ABSTRACT:
A surface acoustic wave device includes a semiconductor substrate, a piezoelectric film disposed on the semiconductor substrate, at least one pair of comb-shaped electrodes constituting an input transducer and an output transducer, a plurality of surface acoustic wave filters having different bands which include a plurality of metal electrodes, so disposed that each of them is located between the input and output comb-shaped electrodes of each of the surface, acoustic wave filters, a bias voltage applying arrangement for applying bias voltages to each of the metal electrodes; and a bias voltage regulating arrangement for regulating the bias voltages.

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