Method and apparatus for controlling coordinate displacements of

Details Method and apparatus for controlling coordinate displacements of Method and apparatus for controlling coordinate displacements of

1997-05-06

1999-05-04

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318603, 359393, 2504911, G05D 310, G02B 2124, G01B 2100

Patent

active

059007087

ABSTRACT:
The apparatus includes a combination of a microscope and an interactive image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.

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