Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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H01P 904

Patent

active

059005491

ABSTRACT:
An angular velocity sensor includes a movable bi-directional electrode and a fixed bi-directional electrode wherein L-shaped electrode plates of the movable bi-directional vibration-urging electrode mesh in spaced relationship with L-shaped electrode plates of the fixed bi-directional electrode. In one embodiment in response to a vibration driving signal applied between the electrodes, a vibration plate vibrates with a large amplitude in one direction parallel to the direction in which bent parts of the L-shaped electrode plates extend. If an angular velocity .OMEGA..sub.Z about the Z axis is applied to the vibration plate, the vibration plate is greatly displaced in the Y direction by Coriolis force. This displacement is detected by a displacement detecting part with high accuracy. In another embodiment, the bi-directional electrodes serve as the displacement detecting part.

REFERENCES:
patent: 5359893 (1994-11-01), Dunn
patent: 5447068 (1995-09-01), Tang

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