Single wafer processor with a bowl

Details Single wafer processor with a bowl Single wafer processor with a bowl

1991-01-11

1992-10-20

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134183, 134200, 134902, 134157, B08B 302

Patent

active

051561743

ABSTRACT:
A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.

REFERENCES:
patent: 3136323 (1964-06-01), Martz et al.
patent: 3494815 (1970-02-01), Yoshimatsu et al.
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4161356 (1979-07-01), Giffin et al.
patent: 4745422 (1988-05-01), Matsuoka et al.
patent: 4788994 (1988-12-01), Shinbara
patent: 4871417 (1987-10-01), Nishizawa
patent: 4922277 (1990-05-01), Carlson et al.

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