Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1988-08-31
1989-09-26
Silverman, Stanley
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
118723, 427 451, B05D 314
Patent
active
048699241
ABSTRACT:
This invention provides a method for synthesis of diamond by contacting a substrate with a mixed gas of carbon source gas and hydrogen gas activated by irradiation with microwave to produce plasma, thereby to deposit diamond on the surface of the substrate wherein microwave is introduced from a plurality of directions to the substrate and an apparatus for synthesis of diamond which comprises at least one microwave oscillator which oscillates microwave, a plurality of waveguides for introducing from a plurality of directions the microwave oscillated from said microwave oscillator to a substrate for deposition of diamond, and a reaction chamber which is connected to said waveguides and in which diamond is deposited by generation of plasma thereby to form a diamond thin film on the surface of said substrate.
REFERENCES:
patent: 3030187 (1962-04-01), Eversole
patent: 3030188 (1962-04-01), Eversole
patent: 3371996 (1968-03-01), Hibshman
patent: 4434188 (1984-02-01), Kamo et al.
patent: 4532199 (1985-07-01), Ueno et al.
patent: 4728529 (1988-03-01), Etzkorn
Idemitsu Petrochemical Company Limited
Silverman Stanley
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