Microwave enhanced CVD method for depositing carbon

Details Microwave enhanced CVD method for depositing carbon Microwave enhanced CVD method for depositing carbon

1988-02-24

1989-09-26

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 35, 427 451, 427 47, 427122, 427249, 4272552, B05D 306

Patent

active

048699233

ABSTRACT:
A method of making a diamond or diamond-like carbon containing 0.01-1.0 weight percent nitrogen on a substrate where an electromagnetic energy is applied to a productive gas comprising carbon and an additive gas comprising nitrogen and the above carbon product is deposited on a substrate.

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