Thermal isolation microstructure

Details Thermal isolation microstructure Thermal isolation microstructure

1988-02-29

1996-07-09

Nelson, Peter A.

Etching a substrate: processes

Forming or treating electrical conductor article

Forming or treating a crossover

156345, 342 5, 257 16, 20419232, 216 48, 216 67, 216 79, B44C 122, C23F 102

Patent

active

055341110

ABSTRACT:
A thermal isolation microstructure fabricated by a process which allows the ultra thinning of support legs for the microdetector.

REFERENCES:
patent: 3980915 (1976-09-01), Chapman et al.
patent: 4416051 (1983-11-01), Thomas et al.
patent: 4689112 (1987-08-01), Bersin
patent: 4699689 (1987-10-01), Bersin

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