Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1995-07-14
1998-06-30
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324769, 437 8, 29838, G01R 3100
Patent
active
057739897
ABSTRACT:
A method and apparatus for measuring the concentration of mobile ions in the oxide layer of a semiconductor wafer from the contact potential shift caused by ion drift across the oxide that includes depositing charge (e.g., using a corona discharge device) on the surface of the oxide and heating the wafer to allow mobile ions in the oxide (especially Na.sup.+) to drift. The difference in the contact potential measured before and after heating provides an indication of the mobile ion concentration in the oxide layer.
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Edelman Piotr
Hoff Andrew M.
Jastrzebski Lubek
Lagowski Jacek
Bowser Barry C.
Karlsen Ernest F.
Semiconductor Diagnostics, Inc.
University of South Florida
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