Method of manufacturing semiconductor devices

Details Method of manufacturing semiconductor devices Method of manufacturing semiconductor devices

1988-10-14

1992-01-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 40, 437 81, 437 89, 437107, 437110, 437126, 437127, 437129, 437133, 437203, H01L 21205

Patent

active

050844105

ABSTRACT:
A semiconductor device which comprises a semiconductor substrate having a surface orientation substantially in a {100}-orientation is provided. On the semiconductor substrate, plural steps formed in a direction deviated substantially from a <110>-direction by 5 degrees or more are formed. The steps, which are mesa and concave portions, are buried by plural semiconductor crystal layers grown by the use of MOCVD or the like. A method of manufacturing such a device is also provided.

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