Process for preparing a thin film of superconducting compound ox

Details Process for preparing a thin film of superconducting compound ox Process for preparing a thin film of superconducting compound ox

1990-05-16

1992-01-28

Rosenberg, Peter D.

Chemistry of inorganic compounds

Oxygen or compound thereof

Metal containing

75 1011, 75 1029, 75 1064, C22B 400

Patent

active

050842650

ABSTRACT:
A process for preparing a superconducting thin film of a compound oxide by a process which is similar to MBE technique. In the present process, a plurality of atom beams or molecular beams each contains one element selected from constituent elements of the compound oxide are directed onto a substrate in a predetermined order, so that a plurality of mono-molecular layers are deposited on the substrate.

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Koch et al., "Thin Films and Squids made from Y Ba.sub.2 Cu.sub.3 O.sub.y ", Materials Research Society.
Spah et al., "Parameters for In Situ Growth of High T.sub.c Superconducting Thin Film Using an Oxygen Plasma Source", Applied Physics Letters, vol. 53, No. 5, pp. 441-443, Aug. 1, 1988.

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