Multi-level deformable mirror device

Details Multi-level deformable mirror device Multi-level deformable mirror device

1990-06-29

1992-01-28

LaRoche, Eugene R.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359846, 359900, G11C 1304

Patent

active

050838571

ABSTRACT:
A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for bright, high-density displays such as are used in high-definition television applications.

REFERENCES:
patent: 4566935 (1986-01-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 4956619 (1990-09-01), Hornbeck
patent: 5018256 (1991-05-01), Hornbeck

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