Scan type exposure apparatus and method having a reference plate

Details Scan type exposure apparatus and method having a reference plate Scan type exposure apparatus and method having a reference plate

1996-04-19

1998-05-19

Le, Que

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

2505593, 356400, 355 55, G01N 2186

Patent

active

057539260

ABSTRACT:
A scan type exposure apparatus includes a first movable stage for carrying a reticle thereon and a second movable stage for carrying a wafer thereon, a projection system for projecting a pattern of the reticle onto the wafer through a projection optical system while scanningly moving the first and second movable stages in a timed relation, relative to the projection optical system, a first mark formed on the reticle and including a plurality of marks arrayed along a scan direction, a reference plate fixedly mounted on the second movable stage and having a second mark including a plurality of marks arrayed along the scan direction, a third movable stage for carrying the second movable stage thereon and being movable in a direction different from the movement direction of the second stage, and a photodetector fixedly mounted on the third movable stage. The second and third movable stages are moved so as to place the reference plate and the photodetector at a position of an image of the first mark as projected by the projection optical system, and the image of the first mark is detected through the second mark by using the photodetector while moving the first and second movable stages in a timed relation, relative to the projection optical system.

REFERENCES:
patent: 4659227 (1987-04-01), Sato et al.
patent: 4677474 (1987-06-01), Sato et al.
patent: 4870288 (1989-09-01), Abuku et al.
patent: 5168306 (1992-12-01), Morimoto et al.
patent: 5270771 (1993-12-01), Sato
patent: 5499099 (1996-03-01), Sato et al.
patent: 5502313 (1996-03-01), Nakamura et al.
patent: 5569930 (1996-10-01), Imai

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