Electromagnetic deflector

Details Electromagnetic deflector Electromagnetic deflector

1996-11-12

1998-05-19

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

335210, H01J 4920

Patent

active

057539227

ABSTRACT:
Electromagnetic deflectors and methods for their manufacture are disclosed. The excitation coils inside such deflectors can be situated relative to each other and to an optical axis with a high degree of accuracy and precision. A pair of loop-shaped channels are formed opposite each other in the sides of a cylindrical insulating cylinder. An electrically conductive material is embedded in the channels to form a set of opposing coils operable to deflect a charged particle beam passing axially through the cylinder in one dimension. Multiple cylinders each comprising a set of opposing coils can be concentrically assembled to provide, e.g., a biaxial deflector operable to deflect the beam in an X-dimension and a Y-dimension. In such a biaxial deflector, the sets of coils are arranged perpendicular to each other. The cylinder(s) is placed concentrically inside a cylindrical outer casing made of a ferromagnetic material such as ferrite to make an electromagnetic deflector.

REFERENCES:
patent: 4785176 (1988-11-01), Frosien et al.
patent: 5264706 (1993-11-01), Oae et al.

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