Plasma treatment apparatus and method

Details Plasma treatment apparatus and method Plasma treatment apparatus and method

1996-02-07

1998-05-19

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912144, 21912151, 156345, 1566461, B23K 1000

Patent

active

057538867

ABSTRACT:
A plasma treatment and apparatus which enables improved uniform plasma treatment over the entire surface of an object to be treated, improved yield, and higher treatment speed is provided. In a gas introduction passage, the gas capable of plasma discharge is preexcited to raise its level of excitation. A first pair of plasma generation electrodes downstream along the gas flow passage use the preexcited gas to generate a plasma in a first plasma generation position. Further downstream, a second pair of plasma generation electrodes positioned in a second plasma generation position, where the activated state of the gas activated in the first plasma region is maintained, activates the gas to generate a plasma containing activated gas species. The object to be treated is treated by the activated gas species in the second plasma region.

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