Interferential measurement device for at least one direction of

Details Interferential measurement device for at least one direction of Interferential measurement device for at least one direction of

1991-10-16

1993-11-23

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, 356305, 356399, 356401, G01B 1102

Patent

active

052649156

ABSTRACT:
In an interferential measurement device for at least one direction of measurement for measuring the relative position of objects, the collimated light beam bundle emanating from a light source is split into three diffraction beams in the at least one direction of measurement at a scanning grid. These three diffraction beams are divided into eight diffraction beams at a cross grid of a material measure and in turn come to interference at a scanning grid under renewed diffraction. The resultant diffraction beams fall on detectors for the generation of measured positional values for the at least one direction of measurement. The cross grid of the scale extends diagonally to the at least one direction of measurement and has an effective grid constant de in the direction of measurement, which agrees with the grid constant d of the scanning grid. The detectors are disposed in such a way that only diffraction beams are detected, which were deflected by the cross grid in the X direction of measurement and in the Y direction extending vertically thereto.

REFERENCES:
patent: 3648055 (1972-03-01), DeLang
patent: 4176276 (1979-11-01), Kaul et al.
patent: 4576850 (1986-03-01), Martens
patent: 4636076 (1987-01-01), Pettigrew
patent: 4776701 (1988-10-01), Pettigrew
V. Sieber, "Photoelektrischer x-y-Langenschrittgeber," Band 75, Heft 12, Feinwerktechnik, 490-93, Dec. 1971.
Dissertation, Hock, "Photoelektrische Messung Der Anderung Von Langen Oder Winkelpositionen Mit Hilfe von Beugungsgitteren," 1975.
Rassudova and Gerasimov, "The Use of Reflection Diffraction Gratings in Interference Systems for Measuring Linear Shifts," Optical Spectroscopy 14, 215 (1963).

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