Coating apparatus – With means to centrifuge work
Patent
1998-08-19
2000-06-20
Vargot, Mathieu D.
Coating apparatus
With means to centrifuge work
118 56, 118319, 118320, 264 133, 264 137, 425 3, 4251744, 425810, 427162, 427240, B29D 1100, B05D 100
Patent
active
060773499
ABSTRACT:
When applying a coating film by a spin coating method on a disc-shaped recording medium, the film thickness difference between the inner rim and the outer rim of the disc has to be suppressed. To this end, a coating liquid is supplied to a center portion of the disc-shaped recording medium and a rotary disc, as a center shaft of a rotary disc is inserted into a recess formed in a turntable on which the disc-shaped recording medium is set and the disc-shaped recording medium and a rotary disc are run in rotation. The coating liquid is spread under the centrifugal force caused by rotation for forming a coating film on the disc-shaped recording medium.
REFERENCES:
patent: 4877475 (1989-10-01), Uchida et al.
patent: 5744193 (1998-04-01), Kitano
patent: 5888433 (1999-03-01), Amo
patent: 5954908 (1999-09-01), Amo et al.
patent: 5980985 (1999-11-01), Kikuchi
Sony Corporation
Vargot Mathieu D.
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