Superconducting detector and method of making same

Details Superconducting detector and method of making same Superconducting detector and method of making same

1992-04-15

1993-11-23

Fourson, George

Fishing, trapping, and vermin destroying

437927, 148DIG12, 505701, 505703, H01L 3118

Patent

active

052643751

ABSTRACT:
A detector useful for detecting infrared (IR) radiation is described which is formed of an epitaxial film of superconductive material having a high transition temperature Tc. Specifically, an oxide of yttrium barium and copper is preferred for the high Tc material. The sensor is formed on a single crystalline silicon body suspended by a silicon nitride membrane over a gap formed in a silicon base body and thermally isolated thereby.

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