Method of testing a phase shift mask and a testing apparatus use

Details Method of testing a phase shift mask and a testing apparatus use Method of testing a phase shift mask and a testing apparatus use

1994-09-30

1995-06-20

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356354, 356345, 250372, G01B 902

Patent

active

054265037

ABSTRACT:
A method and apparatus are provided for obtaining accurately an amount of phase shift and light transmittance in a phase shift mask by a phase shifting portion. A shearing type Mach-Zehnder interferometer is constructed using an optical member for ultraviolet light. Using light having a wavelength identical to that of light used in photolithography, light transmitted through a phase shifting portion interferes with light transmitted through a light transmitting portion, resulting in an interference light intensity signal. From the interference light intensity signal, an amount of phase shifting and light transmittance of the phase shifting portion can be obtained directly and non-destructively.

REFERENCES:
"New Phase Shifting Mask with Self-Aligned Phase Shfiters for a Quarter Micron Photolithography", Nitayama et al, IEDM 89, pp. 57-60.
"Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks", Terasawa et al, JJAP Series 5, pp. 3-9.
"Proceeding of 11th Meeting Japan Society for Laser Microscopy", Hyogo Prefectural Institute of Industrial research, Kobe, Japan, pp. 22-29.
"Interference Equipment for Transmitted-Light Microscopy", Beyer et al., Jena Review 10 (1965), pp. 99-105.
"Epival Interphako Incident-Light Interference Microscope", Beyer H. Jena Review 16, (1971), pp. 82-88.
"Problems Regarding a Micro Pattern Densitometer", Jun Koana, Transactions of the Society of Illumination 1942, pp. 371-385.

Affiliated with

Also associated with

Rating

Method of testing a phase shift mask and a testing apparatus use does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of testing a phase shift mask and a testing apparatus use, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of testing a phase shift mask and a testing apparatus use will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1848095