Method and apparatus for surface-grinding of workpiece

Details Method and apparatus for surface-grinding of workpiece Method and apparatus for surface-grinding of workpiece

1997-10-17

2000-06-20

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451285, 451286, B24B 504

Patent

active

060771496

ABSTRACT:
In a surface-grinding method for a workpiece, for example a semiconductor wafer, it is possible to correct or improve waviness and bow and to obtain a semiconductor wafer having no thickness dispersion. Besides, wafer processing to higher precision than that conventionally attained is achieved and at the same time simplification of the processing method and thereby reduction of the cost are also achieved. In the present invention, while the workpiece is fixed for supporting at one surface by the fixedly supporting means of a surface-grinding apparatus, the other surface of the workpiece is surface-ground, where the workpiece adheres on the upper surface of a base plate by the aid of adhesive material and the base plate is fixedly supported by the lower surface of itself on the fixedly supporting means.

REFERENCES:
patent: 3872626 (1975-03-01), White
patent: 4009539 (1977-03-01), Day
patent: 4316757 (1982-02-01), Walsh
patent: 4579705 (1986-04-01), Matsuoka et al.
patent: 4597228 (1986-07-01), Koyama et al.
patent: 4693036 (1987-09-01), Mori
patent: 4852631 (1989-08-01), Herbin et al.
patent: 5004512 (1991-04-01), Fodera
patent: 5035087 (1991-07-01), Nishiguchi et al.
patent: 5256599 (1993-10-01), Asetta et al.
patent: 5297365 (1994-03-01), Nishioka et al.
patent: 5542874 (1996-08-01), Chikaki

Affiliated with

Also associated with

Rating

Method and apparatus for surface-grinding of workpiece does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for surface-grinding of workpiece, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for surface-grinding of workpiece will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1847587