Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-01-27
1995-06-20
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
H01L 4108
Patent
active
054263409
ABSTRACT:
A surface acoustic wave device includes a hard layer comprising diamond or a diamond-like carbon film, and a piezoelectric layer formed on the hard layer. It further includes a paired interdigital transducer and grounding electrode, which perform an electro-mechanical conversion, with the piezoelectric layer arranged therebetween. Then, the feature of the present invention is to form the grounding electrode of a conductive oxide. It is preferred that the conductive oxide is formed by doping an impurity into a piezoelectric material of ZnO. Therefore, the adhesion between the piezoelectric layer and the hard layer, and the grounding electrodes is increased, so that the device yield is enhanced, and a high electromechanical coupling coefficient can be achieved in a high frequency range.
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Study on High Frequency SAW Filter of (ZnO/Diamond/Si) Structure pp. 271+272 (English synopsis enclosed) Nakahata et al.
High frequency bandpass filter using polycrystalline diamond by Shikata et al. Diamond and Related Materials 1993 pp. 1197 to 1202.
"Diamond-Like Carbon Thin Films" by Akio Hiraki and Hiroshi Kawarada, Faculty of Engineering, Osaka University, Japan; pp. 41-49.
Hachigo Akihiro
Higaki Kenjiro
Nakahata Hideaki
Shikata Shin-ichi
Dougherty Thomas M.
Fasse W. F.
Fasse W. G.
Sumitomo Electric Industries Ltd.
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