Method and apparatus for inspecting the depth of the surface of

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356237, G01N 2188

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active

054263093

ABSTRACT:
Apparatus for the inspection of the surface of a cylindrical object which comprises a rotator for rotating the object to be inspected about its axis, a projector for projecting an incident beam of radiation to form a spot on the surface of the object whilst the object is rotating, a device for providing, relative to the object when being rotated, translation of the spot formed by the projection means, a detector for detecting a scattered beam of radiation which comprises radiation of the incident beam after scattering by the surface of the object and a processor for deriving from the detection by the detector of the scattered beam information about the depth of the surface of the inspected object in the region where the incident beam spot is applied.

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patent: 4532723 (1985-08-01), Kellie et al.
patent: 4660970 (1987-04-01), Ferrano
patent: 4982103 (1991-01-01), Meiffren et al.
patent: 5229619 (1993-07-01), Van Amstel
Bottlinger et al.; "Signale Richtig Interpretieren"; Laser Praxis, No. 1, 1 Jun. 1990, pp. LS54-LS55.
Goodman; "Scanning Laser Illumination System"; IBM Technical Disclosure Bulletin; vol. 27, No. 4B, 1 Sep. 1984; pp. 2643-2644.

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