Flow detector with flow control valve

Details Flow detector with flow control valve Flow detector with flow control valve

1998-11-19

2000-06-20

Chambers, A. Michael

Fluid handling

With indicator, register, recorder, alarm or inspection means

Position or extent of motion indicator

137269, 137545, 137884, E03B 707

Patent

active

060765518

ABSTRACT:
A flow detector that can be effectively used in a clean environment (e.g., a semiconductor fabrication apparatus) and that enables the flow to be measured and regulated by an integrated apparatus. The flow detector includes a detector body having a fluid channel penetrating its interior and having a detection section of a flow sensor disposed in the fluid channel; and input and output blocks having input and output channels in communication with the fluid channel in the detector body. A flow control valve is provided in the output block. The detector body and each of the input and output blocks are joined together via seal members that seal the channels provided in the body and blocks and are fixedly connected at positions separate from the channels using screws.

REFERENCES:
patent: 3785389 (1974-01-01), Friedland et al.
patent: 4399836 (1983-08-01), de Versterre et al.
patent: 4672997 (1987-06-01), Landis et al.
patent: 5439026 (1995-08-01), Moriya et al.
patent: 5603350 (1997-02-01), Stoll et al.
patent: 5819782 (1998-10-01), Itafuji

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