Method of making wafer based sensors and wafer chip sensors

Details Method of making wafer based sensors and wafer chip sensors Method of making wafer based sensors and wafer chip sensors

1997-06-17

2000-10-03

Young, Lee

Metal working

Method of mechanical manufacture

Electrical device making

29 2535, 29619, 29621, 338 22R, 338225D, 338190, H01C 702

Patent

active

061255297

ABSTRACT:
The present invention relates to making sensors by cutting pieces from a boule or ingot of a metal oxide single crystal. The sensors produced are also described.

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