Method for automatic semiconductor wafer inspection

Details Method for automatic semiconductor wafer inspection Method for automatic semiconductor wafer inspection

1990-06-04

1992-07-07

Mancuso, Joseph

Image analysis

Histogram processing

For setting a threshold

358101, 358106, 382 22, 382 30, G06K 900

Patent

active

051290090

ABSTRACT:
An automatic integrated circuit inspection method is provided wherein an image of an integrated circuit is obtained and a direction edge enhancement is performed. An image of an integrated circuit under inspection is then obtained and the direction edge enhancement performed. The second edge enhanced image is then logically compared to the first edge enhanced image. Preferably, the first edge enhanced image is dilated while the second edge enhanced image is skeletonized to improve robustness of the system allowing for magnification and rotation errors in either the sample image or the image under inspection. Further, defects which are located are then classified by obtaining a plurality of images of the defect while changing light conditions. The plurality of defect images are combined to form a feature matrix which is then compared against an expert system database having a large number of feature matrices associated with defect classifications.

REFERENCES:
patent: 4441207 (1984-04-01), Loughheed et al.
patent: 4477926 (1984-10-01), Linger et al.
patent: 4481664 (1984-11-01), Linger et al.
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4648052 (1987-03-01), Fridge
patent: 4659220 (1987-04-01), Bronte et al.
patent: 4731855 (1988-03-01), Suda et al.
patent: 4805123 (1989-02-01), Specht et al.
patent: 4853967 (1989-08-01), Mandeville
patent: 4893346 (1990-11-01), Bishop
patent: 4965842 (1990-10-01), Crossley et al.

Affiliated with

Also associated with

Rating

Method for automatic semiconductor wafer inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for automatic semiconductor wafer inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for automatic semiconductor wafer inspection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1835864