Semiconductor device and method of manufacturing the same

Details Semiconductor device and method of manufacturing the same Semiconductor device and method of manufacturing the same

1986-07-31

1992-07-07

Larkins, William D.

357 60, H01L 2704

Patent

active

051287439

ABSTRACT:
A semiconductor device and the method of manufacturing the same are disclosed, the semiconductor device having a plurality of elements isolated by a groove having a gentle slope at the upper side wall, and a steep slope at the lower side wall. This groove provides low steps on its mouth and occupies a small area on the substrate, thus enabling an extremely high-density integrated circuit to be formed.

REFERENCES:
patent: 3980508 (1976-09-01), Takamiya et al.
patent: 4104086 (1978-08-01), Bondur et al.
patent: 4104090 (1978-08-01), Pogge
patent: 4309716 (1982-01-01), El-Kareh
patent: 4635090 (1987-01-01), Tamaki et al.

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