Method for producing a component according to the anodic bonding

Details Method for producing a component according to the anodic bonding Method for producing a component according to the anodic bonding

1995-08-04

1997-11-04

Trinh, Michael

Fishing, trapping, and vermin destroying

437225, 437974, 148DIG12, H01L 21326

Patent

active

056839472

ABSTRACT:
An anodic bonding method allows uniform pressure on the components to be bonded. This is achieved in that the components which are bonded are structured such that cavities are formed between the components. The cavities are evacuated and the components are thus pressed together during bonding.

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