Method for controlling a substrate interior pressure

Details Method for controlling a substrate interior pressure Method for controlling a substrate interior pressure

1996-02-26

1997-11-04

Beck, Shrive

Coating processes

Immersion or partial immersion

118500, 118503, B05D 118, B05C 1300

Patent

active

056837550

ABSTRACT:
A method including: (a) positioning a hollow substrate having a first end and an open second end in a solution, wherein the substrate is held by a chuck assembly and the open second end is submerged in the solution, wherein gas is present in the hollow portion of the substrate between the solution and the chuck assembly, thereby defining a quantity of trapped gas molecules; (b) removing the substrate from the solution; and (c) changing the quantity of the trapped gas molecules by (i) withdrawing a portion of the trapped gas molecules, or (ii) introducing additional gas molecules into the hollow portion, wherein (i) and (ii) are accomplished through the first end of the substrate, thereby controlling the pressure of the gas in the hollow portion.

REFERENCES:
patent: 3777875 (1973-12-01), Sobran
patent: 3909021 (1975-09-01), Morawski et al.
patent: 3945486 (1976-03-01), Cooper
patent: 4680246 (1987-07-01), Aoki et al.
patent: 4783108 (1988-11-01), Fukuyama et al.
patent: 4863761 (1989-09-01), Puri
patent: 5385759 (1995-01-01), Crump et al.
patent: 5520399 (1996-05-01), Swain et al.

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