Radiant energy – Electron energy analysis
Patent
1994-03-25
1995-09-19
Berman, Jack I.
Radiant energy
Electron energy analysis
H01J 4944
Patent
active
054517834
ABSTRACT:
A charged particle analyzer which irradiates a specimen and analyzes charged particles emitted therefrom, for example a photo electron spectrometer, having a flood-source which emits charged particles to neutralize the charge which develops on a specimen. The analyzer is provided with electrostatic and magnetic lenses which may be used separately or in combination. The flood source is provided within the lens column of the analyzer and is arranged such that when the electrostatic lens is in use, the charged particles emitted by the flood source pass around the outside of the objective electrostatic lens element, whereas when the magnetic lens is in use, or when both lenses are in use, they pass through that element.
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Coxon Peter
McIntosh Bruce J.
Berman Jack I.
Fisons plc
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