Method of laser CVD seal a die edge

Details Method of laser CVD seal a die edge Method of laser CVD seal a die edge

1991-02-20

1995-09-19

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437213, 437215, H01L 21316

Patent

active

054515505

ABSTRACT:
A semiconductor die is enveloped by an ambient gas that will react to the presence of a particular wave length of light. A laser beam is focused on the edge of the die to deposit a dielectric coating. The laser beam or the die is rotated until the dielectric coating covers the entire die edge. The dielectric coating acts as a seal that is impervious to water and other contamination that can reduce the die reliability. The dielectric coating also electrically insulates the die from its surroundings.

REFERENCES:
patent: 4477828 (1984-10-01), Scherer
patent: 4633573 (1987-01-01), Scherer
patent: 4782787 (1988-11-01), Roche

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