Mechanical sensor having a U-shaped planar coil and a magnetic l

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

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73760, 336200, G01B 716, G01L 112

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active

054507553

ABSTRACT:
A mechanical sensor is provided, which includes: a magnetic layer having permeability which is changed in accordance with stress generated therein; a coil having at least two terminals, allowing an electric current to flow therebetween to generate a magnetic flux, thereby magnetizing the magnetic layer; and a substrate integrally supporting the magnetic layer and the coil, wherein the coil is a planar coil including at least one winding, each winding having a U-shaped portion formed of a first conductive line portion, a second conductive line portion, and a connecting portion connecting the first and second conductive line portions, the first and second conductive line portions extending in a first direction, and impedance between the terminals is changed in accordance with a change of inductance caused by a change of the permeability of the magnetic layer.

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patent: 5070317 (1991-12-01), Bhagat
patent: 5194806 (1993-03-01), Obama
EPO Search Report (93117098.9) dated Dec. 28, 1994.
"Oil Pressure Sensor Using Amorphous Magnetic Alloy", SAE Technical Paper Series 920700, pp. 111-118 (1992).
R. E. Jones, Jr., "Analysis of the Efficiency and Inductance of Multiturn Thin Film Magnetic Recording Heads", IEEE Transactions on Magnetics, vol. MAG-14, No. 5, pp. 509-511 (Sep. 1978).
Kawabe, K. et al., "Planar Inductor", IEEE Transactions on Magnetics, vol. MAG-20, No. 5, pp. 1804-1806 (Sep. 1984).

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