Method of forming thin films

Details Method of forming thin films Method of forming thin films

1989-02-15

1992-02-18

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

20419231, C23C 1650, C23C 1624, C23C 1432

Patent

active

050892894

ABSTRACT:
Thin films having controlled properties are formed on a substrate by a method comprising the steps of

REFERENCES:
patent: 4082636 (1978-04-01), Takagi
patent: 4227961 (1980-10-01), Takagi
patent: 4451547 (1984-05-01), Hirai et al.
patent: 4509451 (1985-04-01), Collins et al.
patent: 4522674 (1985-06-01), Ninomiya et al.
patent: 4529475 (1985-07-01), Okano et al.
patent: 4544423 (1985-10-01), Tsuge et al.
patent: 4624859 (1986-11-01), Akira et al.
patent: 4636401 (1987-01-01), Yamazaki et al.
Mattox, From Deposition Technolgies for Film and Coatings (Bunshah, first listed author), (Noyes Publications, Park Ridge, N.J.) c. 1982, pp. 245-268.

Affiliated with

Also associated with

Rating

Method of forming thin films does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming thin films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming thin films will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1821876