Method for making a programmable vertical silicide fuse

Details Method for making a programmable vertical silicide fuse Method for making a programmable vertical silicide fuse

1985-04-12

1987-06-09

Ozaki, George T.

Metal working

Method of mechanical manufacture

Assembling or joining

29590, 29576R, 148188, H01L 21385, H01L 21441

Patent

active

046709703

ABSTRACT:
The present invention provides an improved method of forming semiconductor fuses involving the use of silicide formation by a low temperature process which avoids heat related damage to other device components and circuitry and which provides better electrical reliability than fuses formed by alternative porcesses. According to the present invention, silicides of noble and refractory metals can be formed by solid phase diffusion to form vertical fuses which are conductive after silicide formation.

REFERENCES:
patent: 3752702 (1973-08-01), Iizuka et al.
patent: 3781977 (1974-01-01), Hulmes
patent: 4012235 (1977-03-01), Mayer et al.
patent: 4135295 (1979-01-01), Price
patent: 4174521 (1979-11-01), Neale
patent: 4312046 (1982-01-01), Taylor
patent: 4376984 (1983-03-01), Fukushima et al.
patent: 4403399 (1983-09-01), Taylor
patent: 4468308 (1984-08-01), Scovell et al.
patent: 4518981 (1985-05-01), Schlupp
patent: 4522845 (1985-06-01), Powell et al.

Affiliated with

Also associated with

Rating

Method for making a programmable vertical silicide fuse does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for making a programmable vertical silicide fuse, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making a programmable vertical silicide fuse will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1820112