Vacuum pumping apparatus

Details Vacuum pumping apparatus Vacuum pumping apparatus

1990-09-04

1992-02-18

Bertsch, Richard A.

Pumps

Processes

F04B 1924

Patent

active

050888951

ABSTRACT:
Method and apparatus for achieving a high degree of vacuum pumping in an enclosure utilizing a single-stage pump. A vacuum pumping unit is coupled to a plurality of interconnected enclosures through a series of valves. When evacuation of a selected enclosure is desired, the valves are opened sequentially for a brief duration such that the enclosures are alternatively evacuated to the atmosphere and to other partially evacuated enclosures.

REFERENCES:
patent: 3797516 (1974-03-01), Forster et al.
patent: 4504194 (1985-03-01), Holden
patent: 4725204 (1988-02-01), Powell
The Encyclopedia of Physics, Second Edition, pp. 976-979.
Perry's Chemical Engineers' Handbook, Sixth Edition, pp. 6-32 to 6-37.
Marks' Standard Handbook for Mechanical Engineers, Eighth Edition, pp. 14-44 to 14-48.

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