Process for purifying halosilanes

Details Process for purifying halosilanes Process for purifying halosilanes

1994-05-23

1995-08-29

Spitzer, Robert

Liquid purification or separation

Processes

Ion exchange or selective sorption

210690, 95143, C02F 142, B01J 802

Patent

active

054457424

ABSTRACT:
A process for purifying halosilanes consisting of contacting a mixture comprising a halosilane and a hydrocarbon with an adsorbent selective for the hydrocarbon, thereby reducing the hydrocarbon content of the mixture. The present process is particularly useful for removing hydrocarbon contaminates from chlorosilanes, where the hydrocarbon contaminates have a boiling point similar to that of the chlorosilanes.

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