Illumination system in a scanning electron microscope

Details Illumination system in a scanning electron microscope Illumination system in a scanning electron microscope

1975-04-07

1976-08-31

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, 250311, G21K 108, G21K 700

Patent

active

039783383

ABSTRACT:
A scanning electron microscope comprising a double gap lens in its electron beam irradiating system. The double gap lens is arranged between the electron gun and the final stage condenser lens, and is excited by a lens current such that a large change of electron beam diameter may be controlled by a small change of lens excitation current.

REFERENCES:
patent: 2369782 (1945-02-01), Hillier
patent: 2586559 (1952-02-01), Page
patent: 3696246 (1972-10-01), Buchanan

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