Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1992-02-07
1993-06-01
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
359212, H01J 314
Patent
active
052162478
ABSTRACT:
An optical scanning method is described in which a device essentially comprises a rotational optical system S and a working plane W fed in a predetermined direction. The optical system forms the image of a stationary point A at point B on the working plane W. The image point is scanned along a circular are by rotating the optical system around the rotational axis. In a preferred device, point A lies approximately on the rotational axis and point B lies off the rotational axis. And the circular arc generated by the scanning of point B is in the working plane approximately perpendicular to the rotational axis. A 2-dimensional scanning is completed by the rotation of the optical system around the rotational axis and the translation of the working plane in a predetermined direction, which is synchronized with the rotation of the optical system. When the radiation beam E propagates from point A to B, the device is for information writing in (e.g. lithography) and the working plane is a recording medium. When the radiation beam E propagates from the working plane to point A, the device is for information reading-out or pattern acquisition, in which a point detector is positioned right behind point A. This optical scanning method can be used in visible, UV, IR or soft x-ray waveband, providing, at the same time, large field of view, high resolution and very high data rate.
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Wang Ying
Wang Zhijiang
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