Method of manufacturing nonvolatile semiconductor memory device

Fishing – trapping – and vermin destroying

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437 48, 437 52, 437195, 437228, 437235, H01L 2170

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052159337

ABSTRACT:
The present invention provides a method of manufacturing a nonvolatile semiconductor memory device comprising a floating gate, a control gate, source and drain regions, and a wiring layer connected to the source or drain region. An insulation film having a flat surface is formed to fill the contact hole for the source or drain region, and an insulation film containing phosphorus is formed on the insulation film. The particular construction permits the insulation film to be uniform in thickness so as to improve the charge retaining capability of the floating gate.

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Adams et al., "Planarization of Phosphorus Doped Silicon dioxide" J. of Electrochem Soc. Feb. 1981 pp. 423-429.

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